OCD is a silicon dioxide (SiO2) based coating solution that is used in the manufacturing process of various electronic components.
OCD is composed of silicon compounds [RnSi(OH)4-n] and additives (diffusion impurities, glass forming agents, organic binders) dissolved in organic solvents (alcohol, esters, ketones). OCD can be easily applied by spinners, dipping, etc. The concentration of the coating solution can be easily changed depending on the intended use.
(1) Impurity Diffusion Agent (Type-1)
In the process of manufacturing semiconductor devices, impurities such as P, Sb, As and other compounds are used as doped oxide sources (solid phase and solid phase diffusion) when forming holes and negative holes.
(2) Passivation Film Forming Agent, Step Covering Agent, Insulating Film Forming Agent (Type-2, Type-7)
SiO2 film alone (Type-2 and Type-7) or with the addition of a compound glass forming agent such as P (Type-2) is used as a passivation film forming agent and a step smoothing agent.
(3) Alkali Metal Elution Prevention Films (Type-2, Type-7)
These films can be used in a method to prevent the elution of alkali metal by applying it to the glass substrate for Liquid Crystal Display (LC), Electrochromic (EC), Electroluminescence (EL), etc. or for solar cells (undercoating method), or applying it to the surface of ITO (Transparent Conductive Film), LC, EC, EL films (overcoating method).
We also offer a wide range of products for pharmaceutical and semiconductor applications. It is also used for the manufacture of high performance containers by coating the inner surface of glass containers for pharmaceuticals and semiconductors.
(4) Others (Type-1, Type-2, Type-7)
Other films can be used as light selective absorption films, chemical resistance improvement films, low-friction film forming agents, corrosion-resistant protective films, adhesion improvement films, etc.
OCD Type-12 is an inorganic material that further improves the crack resistance and reduces degassing of conventional (Si-H) OCD Type-10*. *OCD Type-10 is a conventional product for thick inorganic films.
OCD in the text is a pending or registered trademark of TOK.
PBF is a coating solution for diffusion of high concentration boron for semiconductor device manufacturing. The composition of the coating solution is a polymer of organic macromolecules reacted with boron compounds, dissolved in an alcohol-based solvent. Unlike the SOG type, PBF does not contain inorganic binder, which is easily changed, and thus has excellent stability during storage and application. In addition, this type of coating solution is superior to B2O3 dissolved in a solvent in terms of leaving the coating solution untreated, which is advantageous for automation of the coating process.
PBF in the text is a pending or registered trademark of TOK.
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