The following is a list of questions we often receive from our customers regarding the processing equipment we provide, in Q&A format.
If you have any questions that are not listed here, please contact us using the inquiry form. We will have a specialist reach out to you.

Baking Equipment

TN90000N Series

Does oxygen concentration fluctuate during heat treatment?

Because heat treatment is performed under vacuum, the ultra-low oxygen concentration state is maintained.

Is it possible to perform stepwise temperature treatment?

By setting the treatment sequence, it is possible to arbitrarily raise and hold the temperature in response to the temperature setting, and it is possible to set the step sequence.

Coating Equipment

TN36000 Series

Is low viscosity coating possible?

Yes.

What is the maximum size applicable?

Up to 600mm x 600mm is possible.

What is the maximum number of nozzles that can be installed?

It is possible to install a maximum of two units, but if coating is to be carried out, it will be necessary to change the setup.

Is R&D equipment sold as a product?

We sell singular, manual machines for R&D purposes with non-spin coating devices and temporary drying devices (HVCD) that are compatible with G2.5 size (370×470mm) and below. Please contact us for specifics.

TN90000S Series

The applicable viscosities of materials are 1000～10000cP. Is it possible to apply viscosities lower than that?

Although it is necessary to optimize the coating system, it is typically possible to coat low-viscosity materials.

Is it possible to coat multiple areas on a single substrate?

The coating width is fixed and the coating distance can be divided as desired.
Example. 2 x 2 = 4-side coating, 3 x 4 = 12-side coating, etc.

Is R&D equipment sold as a product?

We sell singular, manual machines for R&D purposes with non-spin coating devices and temporary drying devices (HVCD) that are compatible with G2.5 size (370×470mm) and below. Please contact us for specifics.

UV Curing Equipment

TIPS Series

What is chemical reaction-based UV curing process?

The organic film which can be patterned consists of main resin and photosensitive material. TOK's unique UV curing method is important to make the photosensitive material and the main resin react chemically.
As a top photoresist manufacturer, TOK has a wealth of foundational technologies and knowledge, and can provide optimal processes for a wide range of organic films.

Is the UV lamp a consumable? If they are consumables, how often do they need to be replaced?

UV lamps are consumables. No other parts are consumables. The standard replacement cycle is 1,000 hours of continuous lighting.

I heard that UV curing of transparent films reduces the transmittance, so why does this not occur here?

The reason for the decrease in transmittance is due to the chemical bonds inside the organic film. Therefore, a special process is used to prevent this chemical bond from occurring.

Is vacuum UV treatment possible?

Yes, it is possible to choose whether to use vacuum in the configuration of the processing recipe.

Is there any special mechanism for thinner wafers?

TIPS is based on our know-how of thin wafer transfer cultivated in plasma ashing equipment.

Resist Ashing Equipment

TCA-7000 Series

Is TAIKO wafer supported?

Yes.

Why does the TCA-7000 Series have a new wafer pickup mechanism that does not cause de-chucking problems?

Unlike an electrostatic adsorption mechanism, no residual stress is generated, so it is easy to dechuck.

Why is high-speed ashing at room temperature possible?

This is because it is equipped with a plasma source capable of ion-radical ashing.

Are measures taken to prevent back-surface particles?

Yes, the transfer robot is compatible with a Bernoulli chuck, which is a non-contact type for wafers. For the processing stage, plasma cleaning is automatically performed on the surface of the stage for any number of wafers.

Can we process thin wafers with a protective film on the backside?

Yes, it is possible. The processing is no different from normal wafer processing

TCA-5800 Series

Is there an asher for 300mm?

The TCA-7200 series is an asher with compatibility for 300mm.

What kind of ashing source is used?

RF of 13.56MHz is used.

Is vacuum conveyance possible?

The TCA-7000 series is a vacuum conveyance asher series.

What kind of ashing gas is used?

We typically use oxygen alone, but additional gases can be added.

What is the material of the chamber?

The chamber is comprised of black marble.

Is it possible to switch over from another company's asher?

Yes.

How many dry pumps are needed?

Only one dry pump is required.

Semiconductor Packaging

Zero Newton TWM12000 Series

What is the coating thickness of the adhesive?

It is possible to coat from 30～120μm during one instance.

Is a film thickness measuring device provided?

This is an optional service.

How many types of adhesives can be used?

Up to two types can be used under the standard specification.

What is the lamination temperature?

This can range from 170～215℃ depending on conditions.

What wafer size is applicable?

200mm and 300mm are supported.

What is the lamination pressure?

Maximum 4,000kgf is possible for 300mm wafer.

Zero Newton TWR12000 Series

How can the separation layer and adhesive be cleaned?

Each is cleaned with a corresponding specialized chemical solution.

Can you supply cleaning chemicals?

TOK will supply each of the specialized cleaning solutions.

Are the cleaning solvents for adhesives general purpose?

These are specialized chemical solutions.

What is the stress on the wafer when removing the glass?

It is almost zero. (Hence, Zero Newton™)

Is it possible to increase or decrease the number of units?

The number of units can be increased or decreased depending on the process conditions and customer UPH requirements.

Can wafers and dicing tapes be used together?

It is possible by changing the setup, but the load port needs to be specialized.

What wafer size is applicable?

200mm and 300mm are supported.

Zero Newton TWM36000 Series

What is the maximum size applicable?

Up to 600mm x 600mm is possible.

What is the minimum size applicable?

For automatic machines, minimum size goes down to 510 x 515mm. Regarding manual machines for development purposes, please contact us for specifics.

Is there any recommendation for adhesives, etc.?

TOK can provide appropriate stripping and adhesive solutions for each process.

Zero Newton TWR36000 Series

What is the maximum size applicable?

Up to 600mm x 600mm is possible.

What solvent is used to clean the adhesive?

TOK produces the best cleaning solvent for cleaning TOK adhesives.

Zero Newton in the text is a pending or registered trademark of TOK.