Towards a Sustainable Society with PFAS-Free
We strive for harmony between industry and the environment through innovative material technologies.
PFAS-Free Initiative
PFAS (Per- and Polyfluoroalkyl Substances) have been widely used in many industries, including semiconductor manufacturing. However, their persistence in the environment has raised concerns, and international regulations have become increasingly strict. TOK is addressing this challenge head-on by promoting the development of PFAS-Free resists. By integrating our advanced polymer design, microfabrication, and ultra-high purity technologies, we have achieved materials that maintain performance without PFAS. Through innovative material technologies, we aim to create harmony between industry and the environment and contribute to next-generation semiconductor manufacturing.
PFAS-Free Resist Lineup
TOK offers a PFAS-Free lineup of photoresists essential for semiconductor manufacturing.
For KrF resists, we have successfully achieved F-Free solutions. Here are some of our representative PFAS-Free resists.
SEMICON Japan 2025
TOK will showcase its PFAS-Free resist initiatives at SEMICON Japan 2025 through a dedicated panel exhibition.
The display will provide detailed insights into PFAS-Free technologies.
We invite you to visit our booth and experience the future of sustainable semiconductor manufacturing.
