TOK supports global Micro Electro Mechanical Systems (MEMS) manufacturing through photoresists and photosensitive permanent film focused on MEMS and sensor manufacturing processes, which involve many special processes.

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Making a request for a catalog and inquiry

Catalog of inquiry

Get information about our products, technologies, theses, website, and others.

Products for Semiconductor Middle & Back end processes.

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Inquiry form

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Contact us by phone here or click Subsidiaries of left Link.

*We will respond via email as soon as possible.

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Inquiry by telephone

TOKYO OHKA KOGYO CO., LTD.
High Density Integration Marketing Division
Phone+81-44-435-3001
Business hours
(JST)
8:45 to 17:30
(except Saturdays, Sundays, and Holidays)
  • Regarding an inquiry on a national holiday, at the end/beginning of the year, or on our business holiday, we shall make a reply on the next business day or later.
  • We shall make an effort to make a reply quickly. Regarding some types of inquiry, however, we may need some time or be difficult to make a reply.
  • The information entered by customer may be used to make replies from us, provide the information related to services and activities from us, and improve our services or activities.
  •  Please refrain from putting all or a part of our reply to the customer into a status that permits the other persons to use it without our permission (open it to the public on the web site, transfer it to many and unspecified persons by e-mail, etc.). Note that all or a part of our reply can be reproduced or revised without our permission. Otherwise, it may result in an infringement of copyright.

This is the TOKYO OHKA KOGYO (TOK) special website for the MEMS manufacturing field. We are focused on developing photosensitive materials that support the formation of structures and special processing in the MEMS and sensor manufacturing fields. We fulfill many different requests, including requests for materials that address the reduction of manufacturing processes, deep Si etching processes, lift-off processes, cover coats and other needs.