TOK supports global Micro Electro Mechanical Systems (MEMS) manufacturing through photoresists and photosensitive permanent film focused on MEMS and sensor manufacturing processes, which involve many special processes.

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Making a request for a catalog and inquiry

Catalog of inquiry

Get information about our products, technologies, theses, website, and others.

Products for Semiconductor Middle & Back end processes.

半導体パッケージ用フォトレジスト 材料カタログ

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Inquiry by telephone

High Density Integration Marketing Division
Business hours
8:45 to 17:30
(except Saturdays, Sundays, and Holidays)
  • Regarding an inquiry on a national holiday, at the end/beginning of the year, or on our business holiday, we shall make a reply on the next business day or later.
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This is the TOKYO OHKA KOGYO (TOK) special website for the MEMS manufacturing field. We are focused on developing photosensitive materials that support the formation of structures and special processing in the MEMS and sensor manufacturing fields. We fulfill many different requests, including requests for materials that address the reduction of manufacturing processes, deep Si etching processes, lift-off processes, cover coats and other needs.