Tokyo Ohka Kogyo Product Site
UV Curing and Resist Hardening Equipment
This equipment is capable of improving the heat resistance, dry etching resistance, and chemical resistance of various organic thin films.
TIPS-5200/5800 Series
UV Curing System Compatible With G-Line, I-Line, and KrF Resists.
This series is compatible with 100/125/150/200/300mm wafers and is equipped with a wave length modulation system to match the film characteristics. As a top photoresist manufacturer, Tokyo Ohka Kogyo offers its own UV curing process based on chemical reaction. Even transparent films can be cured without degrading the transmittance. It can also be used for thinner wafers such as power semiconductors.
Specs
| Wafer Size | TIPS-5200：300mm/200mm TIPS-5800：200mm/150mm/125mm/100mm |
|---|---|
| UV System | Irradiation unit x 1 set |
| Processing Environment | Environment control |
| Conveyance System | Air conveyance system |
| Processing Temperature | RT~90℃ / heater specification︓90~200℃ |
| Cassette | FOUP/open cassette |
| Vacuum Pump | Dry pump x 1 unit |
| Signal | GEM/GEM300 *Only 300mm equipment |
Process Performance
| Heat Resistance | Improves heat resistance of resists by 50℃ or more |
|---|---|
| Dry Etching Resistance | Improves dry etching resistance of resists by more than 10% |
| Metal Contamination | ＜10E10atoms/cm2 |
| Particle | ＜30 particles/0.2μm-up (300mm wafer) |
| Throughput | ＞50wfs/hr |
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