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G8,10 Coater for FPD Next-generation photoresist coating system based on the Floating Coat System. Faster processing throughput compared to conventional spinless coaters, capable of handling larger substrates.

Spinless coater lineup
(Precision coaters for square substrates) Our impressive installed base achieves consistent processing performance. TOK's time-proven spinless coater can handle a wide range of substrate sizes.

TCS & TD Our line-up of cleaning systems, developers, and baking equipment. Integrate with our spinless coater for complete photolithography solutions.

Our line-up of cleaning systems, developers, and baking equipment. Integrate with our spinless coater for complete photolithography solutions.

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Our line-up of cleaning systems, developers, and baking equipment. Integrate with our spinless coater for complete photolithography solutions.

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